Lam Research Corporation (LRCX)

業務介紹

林研究公司設計、製造、銷售、翻新和維修用於集成電路製造的半導體加工設備。該公司提供以下產品:

ALTUS系統用於沉積鎢金屬化應用的共形薄膜;SABRE電化學沉積產品用於銅互連轉換,提供銅鑲嵌製造;SOLA紫外線熱處理產品用於薄膜處理;以及VECTOR等離子增強化學氣相沉積原子層沉積產品。

該公司還提供SPEED高密度等離子化學氣相沉積產品用於填隙;以及Striker單片原子層沉積產品用於介電薄膜解決方案。

此外,該公司還提供Flex用於介電蝕刻應用;Kiyo用於導體蝕刻應用;Syndion用於穿硅孔蝕刻應用;以及Versys金屬產品用於金屬蝕刻工藝。

該公司還提供Coronus斜邊清潔產品以提高晶圓產量;Da Vinci、DV-Prime、EOS和SP系列產品以解決各種晶圓清洗應用;以及Metryx質量測量系統用於半導體晶圓製造中的高精度實時質量測量。

該公司在美國、中國、歐洲、日本、韓國、東南亞、台灣和國際上向半導體行業銷售其產品和服務。林研究公司成立於1980年,總部位於加利福尼亞州弗里蒙特。



Lam Research Corporation designs, manufactures, markets, refurbishes, and services semiconductor processing equipment used in the fabrication of integrated circuits. The company offers ALTUS systems to deposit conformal films for tungsten metallization applications; SABRE electrochemical deposition products for copper interconnect transition that offers copper damascene manufacturing; SOLA ultraviolet thermal processing products for film treatments; and VECTOR plasma-enhanced CVD ALD products. It also provides SPEED gapfill high-density plasma chemical vapor deposition products; and Striker single-wafer atomic layer deposition products for dielectric film solutions. In addition, the company offers Flex for dielectric etch applications; Kiyo for conductor etch applications; Syndion for through-silicon via etch applications; and Versys metal products for metal etch processes. Further, it provides Coronus bevel clean products to enhance die yield; Da Vinci, DV-Prime, EOS, and SP series products to address various wafer cleaning applications; and Metryx mass metrology systems for high precision in-line mass measurement in semiconductor wafer manufacturing. The company sells its products and services to semiconductors industry in the United States, China, Europe, Japan, Korea, Southeast Asia, Taiwan, and internationally. Lam Research Corporation was incorporated in 1980 and is headquartered in Fremont, California.

公司網址

https://www.lamresearch.com